Authors

Abstract

Efforts to map atomic-scale chemistry at low doses with minimal noise using electron microscopes are fundamentally limited by inelastic interactions. Here, fused multi-modal electron microscopy offers high signalto-noise ratio (SNR) recovery of material chemistry at nano- and atomic- resolution by coupling correlatedinformation encoded within both elastic scattering (high-angle annular dark field (HAADF)) and inelasticspectroscopic signals (electron energy loss (EELS) or energy-dispersive x-ray (EDX)). By linking these simultaneously acquired signals, or modalities, the chemical distribution within nanomaterials can be imagedat significantly lower doses with existing detector hardware. In many cases, the dose requirements can bereduced by over one order of magnitude. This high SNR recovery of chemistry is tested against simulatedand experimental atomic resolution data of heterogeneous nanomaterials.