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Argonne National Laboratory

Recycling Heterostructures to Upcycle Microelectronics

A remarkable synthesis strategy has emerged allowing the growth of 2D single crystals on graphene that can be stacked” atop each other to form a new pseudo-3D material.

There is an emerging synthesis strategy of high-quality condensed matter materials that is poised to revolutionize the field of microelectronics. In this project, we investigated the physics of how 2D crystals grow on graphene with in situ X-ray scattering at the Advanced Photon Source. We and others have demonstrated that single-crystal thin films can be detached from the substrates on which they are grown and re-attached to another material with little to no change in defect concentration. In this way, multifunctional heterostructures can be unzipped” and used for a wide array of applications while the high value and often exotic single-crystal substrates can be recycled.

Schematic diagram of real and reciprocal space during in situ x-ray studies of complex oxide deposition by oxide molecular beam epitaxy.

The tremendous potential and greatest opportunity to reshape the landscape is the ability to merge high-quality dissimilar 2D crystalline materials to create novel multi-functional platforms, which has eluded the microelectronics industry for decades. In our project, we conducted in situ X-ray studies on the fundamental physics of remote epitaxy.” The results shed new light on the process by which epitaxial growth of a thin film occurs through a graphene buffer layer from the seeding growth substrate and the key process essential to the new synthesis strategy [1,2].

  1. X. Yan, H. Cao, Y. Li, H. Hong, D. J. Gosztola, N. P. Guisinger, H. Zhou, and D. D. Fong, In situ X-ray studies on the growth of complex oxides on graphene by molecular beam epitaxy, APL Mater. 10, 091114 (2022).
  2. H. Cao, X. Yan, Y. Li, L. Stan, W. Chen, N. P. Guisinger, H. Zhou, and D. D. Fong, Enhancing the metal-insulator transition in epitaxial VO2 heterostructures with graphene interlayers, Appl. Phys. Lett. 121, 081601 (2022).