Argonne researchers have invented scalable electron amplifier devices and atomic layer deposition (“ALD”) fabrication process methods.
Intellectual Property Available to License
US Patents 10062555B2 & 10121642B2
- Digital electron amplifier with anode readout (DEAAR) device (ANL-IN-14-055 and ANL-IN-14-055B)
Argonne’s ALD fabrication process allows for large area (e.g., eight inches by eight inches) electron amplifier devices to be produced at reduced costs compared to current fabrication processes. The Argonne ALD fabrication process allows for nanostructure functional coatings to impart a desired electrical conductivity and electron emissivity onto low cost borosilicate glass micro-capillary arrays to form the electron amplifier devices.