Argonne National Laboratory

Science and Technology Partnerships and Outreach

Fabrication of Robust, Harsh Environment Compatible MEMS/NEMS Actuators Based on Electrically Conducting Diamond Films (ANL-IN-14-009)

Excellent chemical, mechanical and electrical properties, low intrinsic stress gradient 
Intellectual Property Available to License
US Patent 9,475,690
  • Fabrication of Robust, Harsh Environment Compatible MEMS/NEMS Actuators Based on Electrically Conducting Diamond Films (ANL-IN-14-009)

Nanocrystalline diamond coatings exhibit stress in nano/micro-electro mechanical systems (MEMS). Doped nanocrstalline diamond coatings exhibit increased stress. A carbide forming metal coating reduces the in-plane stress. In addition, without any metal coating, simply growing UNCD or NCD with thickness in the range of 3-4 micron also reduces in-plane stress significantly. Such coatings can be used in MEMS applications.

Benefits

  • Excellent chemical, mechanical and electrical properties, low intrinsic stress gradient 
  • Could be applicable in many fields, including bio-medicine, optics, and sensors and actuators for space applications