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Technology
The invention is a method and system for fabricating micro-channel plate (MCP) detectors. An anodized aluminum oxide membrane is provided and includes a plurality of nanopores which have an Al coating and a thin layer of an emissive oxide material responsive to incident radiation, thereby providing a plurality of radiation sensitive channels for the micro-channel plate detector.
Benefits
By using atomic layer deposition to gain increased control, the invention allows cost-effective, larger-area MCP fabrication. Large-area, fast MCPs could have applications in research, industry, and medicine.