Method to make tailored devices with interesting electrical optical properties for sensors, photonic devices or other electro-optical aplications
Intellectual Property Available to License
Express Licensing
US Patent 10,164,188 B2
- Polymer-hybrid electro-optic devices and method of fabricating polymer-hybrid electro-optic devices (IN-15-133)
A polymer-hybrid electro-optic device is fabricated by providing a semiconductor substrate, depositing a metal electrode layer on the semiconductor substrate, depositing a dielectric barrier core layer within a gap of the metal electrode layer, patterning a polymer layer to cover the dielectric barrier core layer and partially covering the metal electrode layer, infiltrating the polymer layer with an inorganic component to form a hybrid oxide-polymer layer, and removing excess inorganic component from the semiconductor substrate and metal electrode layer.